ESR 2: Precursor engineering for ALD/MLD process (Work Package 1)

Short description of the project

The objectives of this project can be summarized as follows: (1) Design, development and scale up of low molecular weight rigid organic spacers that are stable enough to yield a pillar type of arrangement on a solid support thus replacing the long and flexible alkyl chains generally used in MLD. (2) Tune the reactivity towards organic moieties and enhance the thermal stability of the inorganic precursor counterparts so as to narrow down the thermal window of organic and inorganic species. (3) Development of inorganic precursors bearing mixed oxygen-nitrogen (ketoiminates) or all-nitrogen coordinated ligands (diazabutadiences, guanidinates). (4) Mechanistic studies on precursor reactivity, film nucleation and growth in collaboration with UGent. (5) Promising precursors will be scaled up and tested in commercial reactors located at Aalto & UiO.

Host institute: Ruhr-Universität Bochum

Daily supervisor: Prof. Anjana Devi, Ruhr-Universität Bochum
External supervisor: Dr. Simon Elliott, Tyndall National Institute

Planned secondments:
Aalto University, University of Oslo, Ghent University, Tyndall National Institute, ASM Microchemistry

For more information: contact Prof. Anjana Devi.