ESR 12: Hybrid low-k materials (Work Package 4)

Short description of the project

The overall objective is to combine inorganic and organic materials in a way to minimise the dielectric constant of the material. Besides oxides, also metal fluorides will be used as the inorganic component. Another objective will therefore be an exploration on how fluoride ALD processes can be combined with organic MLD processes.

Host institute: University of Helsinki

Daily supervisors: Dr. Marianna Kemell and Prof. Markku Leskelä, University of Helsinki
External supervisor: Dr. Simon Elliott, Tyndall National Institute

Planned secondments:
Ghent University, IMEC, ASM Microchemistry

For more information: contact Prof. Markku Leskelä.

How to apply

All information concerning eligibility criteria, important dates and how to apply can be found under PhD Positions.